In this study, a time-of-flight mass spectrometer is developed to analyze the mass-to-charge ratio of ion beams generated from an electron beam ion source (EBIS) at the RAON heavy ion accelerator facility. The time-of-flight mass spectrometer comprises a Bradbury–Nielson gate, steerer, mirror electrode, and microchannel plate detector. The Bradbury–Nielson gate is applied to generate a bunch beam with a 5-ns pulse width at the front end of the time-of-flight system. A double-stage reflector is employed to obtain a beam chromatic correction from the energy spread of the ion beam generated from the EBIS. The design is created through optics simulation using the SIMION code, with ¹³³Cs as the reference ion. Consequently, the charge state of 27⁺ separated from neighboring states at a maximum voltage of 20 kV is obtained. By utilizing ion sources of Cs¹⁺ (m/z 133) and Rb¹⁺ (m/z 85 and m/z 87) to perform the performance test on the designed TOFMS system, the spectral peak of the ion sources and a relatively high mass resolution are obtained. This paper introduces the development process and test results of the time-of-flight mass spectrometer in detail.

在这项研究中，研制了一种飞行时间质谱仪，以分析RAON重离子加速器设施中由电子束离子源（EBIS）产生的离子束的质荷比。飞行时间质谱仪包括Bradbury-Nielson门，转向器，镜电极和微通道板检测器。Bradbury–Nielson门在飞行时间系统的前端用于产生脉冲宽度为5 ns的束束。采用双级反射器，从EBIS产生的离子束的能量扩散中获得束色校正。该设计是通过使用SIMION代码以¹³³ Cs作为参考离子的光学仿真来创建的。因此，充电状态为27 ⁺在20 kV的最大电压下获得了与相邻状态的隔离。通过使用Cs ¹⁺（m / z 133）和Rb ¹⁺（m / z 85和m / z 87）的离子源对设计的TOFMS系统进行性能测试，离子源的光谱峰和相对获得高质量分辨率。本文详细介绍了飞行时间质谱仪的开发过程和测试结果。