ABSTRACT

The present article introduces chemical etching for the fabrication of a patterned tool to manufacture micro-sized products. Further, a feasibility study is conducted to produce intricate features using the fabricated patterned tool. High depth with the desired width of geometric feature is required on the patterned tool for this study. Three etching process parameters, concentration, time, and temperature were varied to understand their effect on geometric features obtained, viz. depth and width. A three-level factorial design with three center points was applied to perform experiments. For chemical etching, ferric chloride is used as an etchant. The width and depth of geometric features were measured with the help of a stereomicroscope. The analysis of variance (ANOVA) showed the effective contribution of process variables to the desired geometric features. The desirability approach is used to obtain a set of optimal parametric settings. The optimum value of width (at concentration = 2 M, Temperature = 55°C and Time = 15 minutes) of the feature was 191.55 μm, while depth of feature obtained was 167.28 μm at optimum parametric conditions. The process shows its capability to produce complex features on the patterned tool, which was used as an EDM tool electrode to show the potential of the process.

摘要

本文介绍了用于制造用于制造微型产品的图案化工具的化学蚀刻。此外，还进行了可行性研究，以使用制造的图案化工具生产复杂的特征。本研究的图案化工具需要具有所需几何特征宽度的高深度。三种蚀刻工艺参数、浓度、时间和温度是不同的，以了解它们对获得的几何特征的影响，即。深度和宽度。应用具有三个中心点的三级因子设计来进行实验。对于化学蚀刻，氯化铁用作蚀刻剂。在立体显微镜的帮助下测量几何特征的宽度和深度。方差分析 (ANOVA) 显示了过程变量对所需几何特征的有效贡献。合意性方法用于获得一组最佳参数设置。特征宽度的最佳值（浓度 = 2 M，温度 = 55°C 和时间 = 15 分钟）为 191.55 μm，而在最佳参数条件下获得的特征深度为 167.28 μm。该工艺展示了其在图案化工具上产生复杂特征的能力，该工具用作 EDM 工具电极以显示该工艺的潜力。在最佳参数条件下为 28 μm。该工艺展示了其在图案化工具上产生复杂特征的能力，该工具用作 EDM 工具电极以显示该工艺的潜力。在最佳参数条件下为 28 μm。该工艺展示了其在图案化工具上产生复杂特征的能力，该工具用作 EDM 工具电极以显示该工艺的潜力。