Micro- and nanomechanical resonators have emerged as promising platforms for sensing a broad range of physical properties, such as mass, force, torque, magnetic field, and acceleration. The sensing performance relies critically on the motional mass, mechanical frequency, and linewidth of the mechanical resonator. Herein, we demonstrate a hetero optomechanical crystal (OMC) cavity based on a silicon nanobeam structure. The cavity supports phonon lasing in a fundamental mechanical mode with a frequency of 5.91 GHz, an effective mass of 116 fg, and a mechanical linewidth narrowing in the range from 3.3 MHz to 5.2 kHz, while the optomechanical coupling rate is as high as 1.9 MHz. With this phonon laser, on-chip sensing can be predicted with a resolution of $\delta \lambda /\lambda =1.0\times {10}^{-8}$. The use of a silicon-based hetero OMC cavity that harnesses phonon lasing could pave the way toward high-precision sensors that allow silicon monolithic integration and offer unprecedented sensitivity for a broad range of physical sensing applications.

中文翻译：

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异质光机晶体腔中的声子激光

微米和纳米机械谐振器已成为传感广泛物理特性（如质量、力、扭矩、磁场和加速度）的有前途的平台。传感性能主要取决于机械谐振器的运动质量、机械频率和线宽。在此，我们展示了基于硅纳米束结构的异质光机械晶体 (OMC) 腔。腔体支持基本机械模式声子激光发射，频率为5.91 GHz，有效质量为116 fg，机械线宽在3.3 MHz至5.2 kHz范围内变窄，而光机耦合率高达1.9 MHz . 使用这种声子激光器，可以以分辨率为$\delta \lambda /\lambda =1.0\times {10}^{-8}$. 使用利用声子激光的硅基异质 OMC 腔可为高精度传感器铺平道路，该传感器允许硅单片集成并为广泛的物理传感应用提供前所未有的灵敏度。