Hard yet tough nanocomposite coatings with simultaneously high plastic deformation resistance and elastic deformation recovery capacity represent a new class of compressor protective coatings, which are vital for its serviceability in high sand dust environments due to the blocking effect of nanocrystalline amorphous structure on dislocation and crack. In this work, a set of CrAlSiN (nc-(Cr,Al)N/a-Si₃N₄) nanocomposite coatings was deposited by the filtered cathodic vacuum arc under various nitrogen fluxes. The as-deposited coatings exhibited refined grain size, well-defined nanocrystalline/amorphous phase separation, and highly dense architecture. These features allowed the achievement of the increased properties in terms of high hardness (H = 40.4 GPa) and toughness (H/E* = 0.095, H³/E*² = 0.367) when the nitrogen flux was 100 sccm. Hard yet tough CrAlSiN nanocomposite coating showed excellent scratch response and tribological properties by enhanced cooperative deformability through increased H, H/E*, and H³/E*², local epitaxial growth at interface and annihilation of crack and dislocation multiplication sources in grain boundaries to reduce crack initiation and propagation, and adhesion failure.

硬而坚韧的纳米复合涂层同时具有较高的抗塑性变形能力和弹性变形恢复能力，代表了一类新型的压缩机保护涂层，由于纳米晶无定形结构对位错和裂纹的阻挡作用，因此对于其在高沙尘环境中的可使用性至关重要。在这项工作中，一组CrAlSiN（nc-（Cr，Al）N / a-Si ₃ N ₄）纳米复合涂层是通过过滤的阴极真空电弧在各种氮通量下沉积的。沉积后的涂层表现出细化的晶粒尺寸，定义明确的纳米晶/非晶相分离以及高密度的结构。这些特性可以实现高硬度（H = 40.4 GPa）和韧性（H / E * = 0.095，H³ / E * ²  = 0.367），氮气流量为100 sccm。硬而坚韧的CrAlSiN纳米复合涂层通过提高H，H / E *和H ³ / E * ^2的协同变形能力，界面处的局部外延生长以及消除晶界中的裂纹和位错倍增源而表现出优异的划痕响应和摩擦学性能减少裂纹的产生和蔓延以及粘合失败。