Laser-induced breakdown spectroscopy (LIBS) is a well-established elemental analysis method, thanks to negligible sample preparation, rapid analysis, and a spatially resolved sensitivity down to trace level, in any kind of matrix. State-of-the-art LIBS is operated in the optical spectral range (UV-VIS). Unfortunately, the measurement precision is limited by the moderate stability and repeatability of the plasma emission. The detection and sensitivity to crucial elements such as light elements and halogens are also limited. This is particularly critical for inhomogeneous materials where signal fluctuation is related to the spatial elemental distribution. To overcome these disadvantages specific, LIBS techniques arrangement are often required. Laser-induced XUV Spectroscopy (LIXS) has some intrinsic advantages for overcoming some of the above mentioned limitations and it can support the spectroscopic information collected in the UV-VIS range.

激光诱导击穿光谱法（LIBS）是一种行之有效的元素分析方法，这要归功于样品制备，快速分析以及在任何类型的基质中直至痕量水平的空间分辨灵敏度，都可以忽略不计。最新的LIBS在光谱范围（UV-VIS）中运行。不幸的是，测量精度受到等离子体发射的中等稳定性和可重复性的限制。对诸如轻元素和卤素之类的关键元素的检测和灵敏度也受到限制。对于信号波动与空间元素分布有关的不均匀材料，这尤其重要。为了克服这些特定的缺点，经常需要LIBS技术布置。