ZnO nanostructures gained much attention for the micro/nano devices fabrication, but it is facing challenges in the deposition on the flexible substrate for optoelectronics applications. In the present work, Laser-Induced Forward Transfer (LIFT) was deployed for the deposition of the ZnO nanostructures on the flexible polyethylene terephthalate (PET) sheet using Indium Tin Oxide (ITO) sacrificial layer. The process window was developed for the laser parameters in COMSOL Multiphysics simulation for estimating the temperature distribution. Three different laser wavelengths (355 nm, 532 nm, and 1064 nm) and laser fluence ranging from 100 to 550 mJ/cm² were used in the numerical simulation. Subsequent to the numerical simulation, the LIFT process was deployed at three different laser fluence (100, 250, and 550 mJ/cm²) with 355 nm wavelength for the transfer of ZnO nanorods. SEM images reveal that the higher fluence (550 mJ/cm²) melts the donor materials and degrades the quality of deposition. During the experiments, the time-resolved imaging measured the velocity of the deposited materials and observed that the velocity of 960 m/s, 200 m/s, and 90 m/s is achieved at a laser fluence of 550, 250 and 100 mJ/cm², respectively. The XRD analysis and PL analysis show better structural and optical properties of deposited ZnO nanostructures as compared to previously published work available in the literature.

ZnO纳米结构在微/纳米器件的制造中引起了广泛关注，但在光电子应用的柔性基板上沉积方面面临着挑战。在当前的工作中，采用激光诱导正向转移（LIFT）来使用氧化铟锡（ITO）牺牲层在柔性聚对苯二甲酸乙二醇酯（PET）片材上沉积ZnO纳米结构。在COMSOL Multiphysics仿真中为激光参数开发了处理窗口，以估计温度分布。三种不同的激光波长（355 nm，532 nm和1064 nm），激光通量范围为100至550 mJ / cm ²被用于数值模拟。在数值模拟之后，LIFT工艺被部署在三种不同的激光能量密度（100、250和550 mJ / cm ²）下，波长为355 nm，用于转移ZnO纳米棒。SEM图像显示出更高的通量（550mJ / cm ²）熔化了供体材料并降低了沉积质量。在实验过程中，时间分辨成像测量了沉积材料的速度，并观察到在550、250和100 mJ的激光通量下可达到960 m / s，200 m / s和90 m / s的速度。 / cm ²。与文献中先前发表的工作相比，XRD分析和PL分析显示出沉积的ZnO纳米结构具有更好的结构和光学性能。