This work reports the fabrication of ZnO single-nanowire (SNW) Schottky diode based-sensors with micro-cantilever printed AgNP contact pads, for room temperature (RT) detection of air pollutants such as CO2 and CO. ZnO SNWs with length in range of ~ 1-5 μm and diameter in the range of ~ 90-250 nm have been placed on a silicon substrate by drop-casting an optimized dispersion of ZnO nanowires in de-ionised (DI) water. ZnO nanowire dispersion is further optimized by adding sodium dodecyl sulfate (SDS) and acetic acid to form longer nanowires which ease the reproducibility and scaling of the fabrication process. The sensors demonstrate a wide gas-sensing range of 500 ppb to 500 ppm and 10 ppb to 9 ppm for CO2 and CO respectively. A higher sensitivity of 0.34%/ppm and 0.28%/ppm is obtained for CO2 and CO respectively. It is found that SDS treatment makes sensors more selective towards CO2 and CO. The fabricated sensors show a low response time mostly in a range of ~ 5-10 s and recovery time in a range of ~ 2-10 minutes. These sensors are stable within a relative humidity range of (15-75)%.

中文翻译：

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使用印刷 ZnO 单纳米线肖特基二极管的室温空气污染物传感器


这项工作报告了基于 ZnO 单纳米线 (SNW) 肖特基二极管的传感器的制造，该传感器具有微悬臂梁印刷的 AgNP 接触垫，用于室温 (RT) 检测空气污染物，如 CO2 和 CO。 ZnO SNW 的长度范围为通过在去离子 (DI) 水中滴铸优化的 ZnO 纳米线分散体，将直径约 1-5 μm、直径约 90-250 nm 放置在硅基板上。通过添加十二烷基硫酸钠 (SDS) 和乙酸形成更长的纳米线，进一步优化 ZnO 纳米线分散体，从而简化制造过程的再现性和规模化。这些传感器对 CO2 和 CO 的气体传感范围分别为 500 ppb 至 500 ppm 和 10 ppb 至 9 ppm。 CO2 和 CO 的灵敏度分别为 0.34%/ppm 和 0.28%/ppm。研究发现，SDS 处理使传感器对 CO2 和 CO 更具选择性。所制造的传感器表现出较低的响应时间，大多在 5-10 秒范围内，恢复时间在 2-10 分钟范围内。这些传感器在 (15-75)% 的相对湿度范围内保持稳定。