In this work, a multi-parameter point sensor based on the combination of Fabry-Perot (FP) and the anti-resonant (AR) reflecting guidance in cascade configuration is proposed and experimentally demonstrated. This structure, based on FP interference and AR reflecting guidance, was fabricated with two different air micro-cavities. The attained experimental results showed different strain and temperature sensitivities for the antiresonance contribution. However, when analyzing the FP interference, only strain sensitivity was observed, demonstrating that this air micro-cavity was also insensitive to temperature variations.

中文翻译：

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基于多干涉串行配置的多参数传感器，用于温度和应变测量


在这项工作中，提出并实验证明了一种基于法布里-珀罗（FP）和反谐振（AR）反射制导相结合的多参数点传感器。该结构基于 FP 干涉和 AR 反射制导，由两种不同的空气微腔制成。获得的实验结果表明反共振贡献具有不同的应变和温度敏感性。然而，在分析 FP 干扰时，仅观察到应变敏感性，这表明该空气微腔对温度变化也不敏感。