The heat conduction and infrared absorption properties of the dielectric film have a great influence on the thermopile performance. Thinning the dielectric film, reducing its contact area with the silicon substrate, or adding high-absorptivity nanomaterials has been proven to be effective in improving thermopiles. However, these methods may result in a decrease in the structural mechanical strength and increases in the fabrication complexity and cost. In this work, a new performance-enhancement strategy for thermopiles by simultaneously controlling the heat conduction and infrared absorption with a TExtured DIelectric (TEDI) film is developed and presented. The TEDI film is formed in situ by a simple hard-molding process that is compatible with the fabrication of traditional thermopiles. Compared to the control FLat DIelectric (FLDI) film, the intrinsic thermal conductance of the TEDI film can be reduced by ~18–30%, while the infrared absorption can be increased by ~7–13%. Correspondingly, the responsivity and detectivity of the fabricated TEDI film-based thermopile can be significantly enhanced by ~38–64%. An optimized TEDI film-based thermopile has achieved a responsivity of 156.89 V·W⁻¹ and a detectivity of 2.16 × 10⁸ cm·Hz^1/2·W⁻¹, while the response time constant can remain <12 ms. These results exhibit the great potential of using this strategy to develop high-performance thermopiles and enhance other sensors with heat transfer and/or infrared absorption mechanisms.

介电薄膜的导热和红外吸收性能对热电堆性能有很大影响。减薄介电膜、减少其与硅基板的接触面积或添加高吸收率纳米材料已被证明可有效改善热电堆。然而，这些方法可能导致结构机械强度的降低以及制造复杂性和成本的增加。在这项工作中，开发并提出了一种新的热电堆性能增强策略，该策略通过使用 TExtured DIelectric (TEDI) 薄膜同时控制热传导和红外吸收。TEDI 薄膜是通过简单的硬模制工艺在原位形成的，该工艺与传统热电堆的制造兼容。与对照 FLat DIelectric (FLDI) 薄膜相比，TEDI 薄膜的固有热导率可降低约 18-30%，而红外吸收可增加约 7-13%。相应地，制造的基于 TEDI 薄膜的热电堆的响应度和探测率可以显着提高约 38-64%。优化的基于 TEDI 薄膜的热电堆实现了 156.89 V·W 的响应度^-1和 2.16 × 10 ⁸  cm·Hz ^1/2 ·W ^-1的探测率，而响应时间常数可以保持 <12 ms。这些结果展示了使用这种策略开发高性能热电堆和增强其他具有传热和/或红外吸收机制的传感器的巨大潜力。