As a common type of microelectromechanical systems (MEMS) inertial sensors, comb-structured air-gap acceleration sensors have been applied to various industrial devices and systems. Printed electronics technology has emerged recently as an alternative for fabrication of flexible electronic devices with superior productivity and eco-friendliness to MEMS technology. However, air-gap structures are hard to realize through printing without etching process, and thus comb-structured acceleration sensors have been rarely reported in the printed electronics field in spite of many advantages. This study presents design of a comb-structured air-gap acceleration sensor and materials and processes for highly productive roll-to-roll printed electronic fabrication of the sensor. The sensor is designed to have multiple layers in two parts: fixed fingers are in the lower part while the movable mass and movable fingers in the upper part. Both parts are processed separately on different flexible PET substrates by roll-to-roll gravure printing and drying. Then the upper part is transferred and bonded to the lower one and air-gap structure is formed as a result. This paper also provides electrical characteristics of the proposed comb-structured acceleration sensor by testing capacitance change as a function of acceleration.

作为一种常见的微机电系统（MEMS）惯性传感器，梳状气隙加速度传感器已应用于各种工业设备和系统。印刷电子技术最近已经出现，成为制造柔性电子设备的替代方法，它具有比MEMS技术更高的生产率和生态友好性。然而，气隙结构难以通过没有蚀刻工艺的印刷来实现，因此，尽管具有许多优点，但在印刷电子领域很少报道梳状结构的加速度传感器。这项研究提出了梳状结构气隙加速度传感器的设计以及用于传感器的高效率卷对卷印刷电子制造的材料和工艺。传感器被设计为具有两部分的多层：固定指状物位于下部，而可动质量块和可动指状物位于上部。通过辊对辊凹版印刷和干燥，将这两个零件分别在不同的柔性PET基材上进行处理。然后，将上部转移并结合到下部，从而形成气隙结构。本文还通过测试电容变化作为加速度的函数，提供了所提出的梳状结构加速度传感器的电气特性。