MoS₂/DLC composite films were prepared by a dual-target co-sputtering technique on silicon substrate. The composite films show a smooth surface with significantly reduced cracks and columnar structures. The crystal particles of the composite films became finer after using the composite, and the graphite-like structure carbon was incorporated into MoS₂, which affected the crystallization and growth of MoS₂. The hydrophobic and mechanical properties of the composite films and the thermal corrosion behavior of the composite films were also investigated. The results show that the friction coefficients of MoS₂, DLC and MoS₂/DLC films are 0.2159, 0.0671 and 0.0566, respectively. It is obviously that the composite films exhibit good friction properties. After 120 h of corrosion at room temperature, the composite films lost 1.9 × 10⁻³ mg/cm², which is lower than the other two films of 2.1 × 10⁻³ mg/cm² and 5.7 × 10⁻³ mg/cm², thereby showing an excellent corrosion resistance.

通过双靶共溅射技术在硅衬底上制备了MoS ₂ / DLC复合膜。复合膜显示出光滑的表面，具有明显减少的裂纹和柱状结构。所述复合膜的结晶颗粒变得使用复合后微细化，类石墨结构的碳被编入的MoS ₂，这影响的MoS的结晶和生长₂。还研究了复合膜的疏水性和机械性能以及复合膜的热腐蚀行为。结果表明，MoS ₂，DLC和MoS ₂的摩擦系数/ DLC膜分别为0.2159、0.0671和0.0566。显然，复合膜表现出良好的摩擦性能。在室温下腐蚀120小时后，复合膜的损失为1.9×10 ^-3  mg / cm ²，低于其他两层膜的2.1×10 ^-3  mg / cm ²和5.7×10 ^-3  mg / cm 2^{如图2所示}，因此显示出优异的耐腐蚀性。