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A non-equilibrium atmospheric pressure Capacitively-Coupled-Plasma (CCP) driven at VHF (162 MHz) for plasma catalysis of CO2 into CO
Current Applied Physics ( IF 2.4 ) Pub Date : 2021-05-07 , DOI: 10.1016/j.cap.2021.04.016
Cleo Harvey , S. Vandenburg , A.R. Ellingboe

The design of a Very-High-Frequency (VHF) 162 MHz driven atmospheric-pressure Capacitively-Coupled-Plasma (CCP), with top and bottom electrodes operated in push-pull configuration, powered via a Power-Splitting-Transmission-Line-Driver (PSTLD), is presented. Application to the reprocessing of carbon dioxide into carbon-monoxide in this "high” VHF atmospheric plasma is presented, demonstrating some behaviour of the plasma source. rf power in the system is characterized using measured current (~ 1′s Amps peak) and voltage (~ 10′s Volts peak) waveforms at the electrode; Both are sinusoidal confirming a glow-discharge operational condition. Analysis of Optical Emission Spectra results find a highly non-equilibrium plasma, with high vibrational temperatures (from N2) in the range ~4000 K, while gas temperature, monitored by a thermocouple at the gas outlet, remains low ~300 K, and confirmed by analysis of the N2 rotational bands. The relative density of CO produced, as a by-product of CO2 dissociation, is measured optically using N2 as an actinometer. The CO density increases with rf power and longer gas residence times in the plasma volume. The high VHF atmospheric plasma is found to operate in pure CO2 flows (no helium) with minimal gas heating for the full range of power densities (specific energy input of 0.4–2 eV per molecule) investigated.



中文翻译:

在VHF(162 MHz)下驱动的非平衡大气压电容耦合等离子体(CCP),用于将CO 2等离子体催化转化为CO

162 MHz甚高频(VHF)驱动的大气压电容耦合等离子体(CCP)设计,其顶部和底部电极采用推挽式配置,并通过功率分离传输线供电。介绍了驱动程序(PSTLD)。介绍了在这种“高” VHF大气等离子体中将二氧化碳再处理为一氧化碳的应用,证明了等离子体源的某些行为。系统中的射频功率通过使用测得的电流(〜1 's Amps峰值)和电压来表征(〜10秒钟电压峰值)在电极处的波形;两者都是正弦曲线,确认了辉光放电的工作状态。对光发射光谱的分析结果发现,高度不平衡的等离子体具有较高的振动温度(来自N 2),范围为〜4000 K,而气体温度(由出气口的热电偶监控)保持在约300 K的低水平,并且通过分析N 2旋转带确定。使用N 2作为光度计光学测量作为CO 2离解的副产物而产生的CO的相对密度。CO密度随着射频功率的增加和在等离子体体积中更长的气体停留时间而增加。发现高VHF大气等离子体在纯CO 2中运行 在整个功率密度范围内(每个分子的比能量输入为0.4–2 eV),在最少的气体加热的情况下(无氦)流动。

更新日期:2021-05-19
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