Flexible Resistive Temperature Detectors (RTDs) based on metal thin film have broad application prospects in smart clothes, however, they are constructed with patterned metal films using complicated manufacturing processes. Herein, we report a simple radio frequency (RF) magnetron sputtering method to fabricate light-weight, inexpensive and flexible temperature sensors (TS), whose sensitive materials act as electrode itself composed of Ni, NiO and Ni/NiO bilayer thin films. The Ni/NiO bilayer TS could be bent in different radius with resistance change below 5% signifying high flexibility. Fabricated Ni/NiO bilayer TS exhibited superior sensing performance with temperature coefficient of resistance (TCR) of 3.8 × 10⁻³ °C⁻¹ compared to 3.2 × 10⁻³ °C⁻¹ and 3.1 × 10⁻³ °C⁻¹ for Ni and NiO thin films respectively. It showed a linear response with R²-value of 0.9852. The Ni/NiO bilayer TS showed TCR of 1.0 × 10⁻⁴ °C⁻¹ even after 16,000 repetitive mechanical bends. Ni/NiO temperature sensor maintains high TCR towards exposure to different chemical solutions (acid, alkaline, detergents). The easy-fabrication process with good surface condition, together with the demonstrated results, suggest Ni/NiO is a promising candidate for flexible RTD device.

基于金属薄膜的柔性电阻式温度检测器（RTD）在智能服装中具有广阔的应用前景，但它们是使用复杂的制造工艺由图案化的金属薄膜构成的。在此，我们报告了一种简单的射频 (RF) 磁控溅射方法来制造重量轻、价格低廉且灵活的温度传感器 (TS)，其敏感材料充当电极本身，由 Ni、NiO 和 Ni/NiO 双层薄膜组成。Ni/NiO 双层 TS 可以以不同的半径弯曲，电阻变化低于 5%，表示高度的灵活性。制造的 Ni/NiO 双层 TS 表现出优异的传感性能，电阻温度系数 (TCR) 为 3.8  ×  10 ^-3  °C ^-1与 3.2  × Ni和NiO薄膜分别为10 ^-3  °C ^-1和3.1  ×  10 ^-3  °C ^-1。它表现出线性响应，R ² -值为0.9852。即使在 16,000 次重复机械弯曲之后，Ni/NiO 双层 TS 也显示出 1.0  ×  10 ^-4  °C ^{-1 的}TCR 。Ni/NiO 温度传感器在暴露于不同的化学溶液（酸、碱、清洁剂）时保持高 TCR。具有良好表面条件的易于制造的过程以及所展示的结果表明 Ni/NiO 是柔性 RTD 设备的有希望的候选者。