X-ray photoemission spectroscopy (XPS) measurements in near-ambient pressure (NAP) conditions result in a signal loss of the primary spectrum as a result of inelastic scattering of photoelectrons in the gas phase. The inelastic scattering of the primary electrons gives rise to a secondary signal that can result in additional and often unwanted features in the measured spectrum. In the present work, we derive equations that can be used to model the resulting signal and provide equations that can be used to simulate or remove the inelastic scattering signal from measured spectra. We demonstrate this process for photoemission spectra of a wide range of kinetic energies, measured from Au, Ag, and Cu, in a variety of gases (N₂, He, H₂, and O₂). The work is supplemented with an open-source software in which the algorithms described here have been implemented and can be used to remove the gas phase inelastic scattering signal.

中文翻译：

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在接近环境压力 XPS 测量中由气相引起的非弹性电子散射

由于气相中光电子的非弹性散射，在接近环境压力 (NAP) 条件下的 X 射线光电子能谱 (XPS) 测量会导致主光谱的信号丢失。初级电子的非弹性散射会产生次级信号，这会导致测量光谱中出现额外的且通常是不需要的特征。在目前的工作中，我们推导出可用于模拟结果信号的方程，并提供可用于模拟或从测量光谱中去除非弹性散射信号的方程。我们展示了在各种气体（N ₂、He、H ₂和 O _{2 ）中}从 Au、Ag 和 Cu 测量的各种动能的光发射光谱的这一过程）。这项工作辅之以一个开源软件，在该软件中已经实现了这里描述的算法，并可用于去除气相非弹性散射信号。