An embedded capacitive sensor in traveling wave ultrasonic motor is proposed for angular detection. Equivalent circuit model of the system is well studied that correlation between sensor structure, parasitic parameters and the property of detection signal is found. Sensor structure is optimized with innovate structural design including multi-layer shielding, planar isolation and differential detection design. The signal-to-noise ratio of the detection signal is found up to 40 ​dB and the angular detection accuracy during step motion is less than 0.1°.

中文翻译：

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一种用于微电机原位角度检测的嵌入式电容传感器

提出了一种嵌入行波超声波电机中的电容传感器用于角度检测。对系统的等效电路模型进行了深入研究，发现了传感器结构、寄生参数与检测信号特性之间的相关性。传感器结构优化，创新结构设计，包括多层屏蔽、平面隔离和差分检测设计。发现检测信号的信噪比高达40dB，步进运动时的角度检测精度小于0.1°。