A single probe method is used to obtain the electron density and electron energy distribution function in a short discharge gap between a rectangular hollow cathode and a mesh anode. It is found that the electron distributions are non-Maxwellian and have an excess of high-energy electrons, the fraction of which decreases with distance from the cathode.

中文翻译：

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空心矩形阴极附近的等离子体参数

使用单探针法在矩形空心阴极和网状阳极之间的短放电间隙中获得电子密度和电子能量分布函数。发现电子分布是非麦克斯韦分布的，并且具有过量的高能电子，其中高能电子的分数随着距阴极的距离而减小。