The crystallization of a-Si by blue laser annealing (BLA) is introduced for low-cost, high-resolution thin-film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low-temperature polycrystalline silicon (LTPS) with protrusion-free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field-effect mobility of 169 cm²/Vs, a smaller subthreshold voltage swing less than 201 mV/dec, and excellent electrical stability and mechanical robustness.

中文翻译：

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使用蓝色激光退火技术的可折叠性极高的LTPS TFT背板，用于低成本制造可卷曲和可折叠的AMOLED显示器

通过可折叠和可卷曲AMOLED显示器的低成本，高分辨率薄膜晶体管（TFT）背板引入了通过蓝色激光退火（BLA）的a-Si结晶。BLA的一大优势是为低温多晶硅（LTPS）提供了无突起的有源沟道。在柔性基板上制造的BLA LTPS TFT具有169 cm ² / Vs的高场效应迁移率，小于201 mV / dec的较小的亚阈值电压摆幅以及出色的电稳定性和机械强度。