Since radiation damage is proportional to fluence, radiation damage limits the spatial resolution of biological structures determined by either X-ray or electron scattering. If only elastic scattering is used for structural information then electrons are superior as the ratio of elastic to inelastic scattering is higher than for X-rays. For soft X-rays in the water window below the O K edge photoabsorption contrast might be better than elastic scattering for distinguishing different biological materials. Phase contrast elastic scattering is most effective in the hard X-ray region up to about 10 keV. Radiation damage limits spatial resolution for most X-ray imaging to 10-20 nm. Local molar concentrations of Na,K and Ca ions can be determined at somewhat lower spatial resolutions using relevant absorption edges. At higher energies Compton scattering is superior and is only limited by the fluence available from the light source, since energy deposition is small.

由于辐射损伤与能量密度成正比，因此辐射损伤限制了由 X 射线或电子散射确定的生物结构的空间分辨率。如果仅将弹性散射用于结构信息，则电子是优越的，因为弹性散射与非弹性散射的比率高于 X 射线。对于在 OK 边缘以下的水窗中的软 X 射线，光吸收对比度可能比弹性散射更好地区分不同的生物材料。相衬弹性散射在高达约 10 keV 的硬 X 射线区域中最有效。辐射损伤将大多数 X 射线成像的空间分辨率限制在 10-20 nm。Na、K 和 Ca 离子的局部摩尔浓度可以使用相关的吸收边缘在稍低的空间分辨率下确定。