As the sensitivity of the optical temperature sensor increases, one of the most important noise sources may be from the fluctuation of the surrounding gas environment (refractive index change). In this work, we have designed and fabricated an optical temperature sensor with a device size of 15 μm². The sensor is constructed by a titanium dioxide grating on top of a double-metal surface plasmon resonance (SPR) structure. Our design can provide minimal gas environment dependence without compromising the performance in terms of temperature sensitivity. In addition, the design also facilitates a generous dimensional tolerance in the device fabrication. Based on the design, a proof-of-concept device has been fabricated and characterized. The obtained sensitivity of the fabricated sensor reaches 135 pm/℃. Meanwhile, the measured resonance wavelength shift is ∼0.004 pm in different gases (air, CH₄, and CO₂). The presented temperature sensor should be convenient and valuable for high-accuracy temperature measurements and integrated opto-electronic sensing chips.

中文翻译：

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通过双金属表面等离子体共振实现与气体环境无关的温度传感器

随着光学温度传感器的灵敏度增加，最重要的噪声源之一可能来自周围气体环境的波动（折射率变化）。在这项工作中，我们设计并用15微米的器件尺寸制造的光学温度传感器²。该传感器由双金属表面等离子体共振（SPR）结构顶部的二氧化钛光栅构成。我们的设计可以提供最小的气体环境依赖性，而不会影响温度敏感性。另外，该设计还促进了器件制造中的大尺寸公差。基于该设计，已经制造并表征了概念验证设备。制成的传感器的灵敏度达到135 pm /℃。同时，在不同的气体（空气，CH ₄和CO ₂）中测得的共振波长偏移为〜0.004 pm 。提出的温度传感器对于高精度温度测量和集成的光电传感芯片应该是方便且有价值的。