sp² nanocrystallited carbon films with large nanocrystallite sizes, smooth surfaces, and relative high hardness were prepared with different ion irradiation densities regulated with the substrate magnetic coil current in an electron cyclotron resonance plasma sputtering system. Their multiscale frictional behaviors were investigated with macro pin-on-disk tribo-tests and micro nanoscratch tests. The results revealed that, at an ion irradiation density of 16 mA/cm², sp² nanocrystallited carbon film exhibits the lowest friction coefficient and good wear resistant properties at both the macroscale and microscale. The film sliding against a Si₃N₄ ball under a contact pressure of 0.57 GPa exhibited a low friction coefficient of 0.09 and a long wear life at the macroscale. Furthermore, the film sliding against a diamond tip under a contact pressure of 4.9 GPa exhibited a stable low friction coefficient of 0.08 with a shallow scratch depth at the microscale. It is suggested that sp² nanocrystallites affect the frictional behaviors in the cases described differently. At the macroscale, the contact interface via the small real contact area and the sp² nanocrystallited transfer layer dominated the frictional behavior, while the sp² nanocrystallited structure in the film with low shear strength and high plastic resistivity, as well as the smooth surface morphology, decided the steady low nanoscratch properties at the microscale. These findings expand multiscale tribological applications of sp² nanocrystallited carbon films.

在电子回旋共振等离子体溅射系统中，通过不同的离子辐照密度，制备了具有较大纳米晶粒尺寸，光滑表面和相对较高硬度的sp ²纳米晶碳膜，该离子辐照密度由衬底磁线圈电流调节。通过宏观销盘摩擦试验和微纳米划痕试验研究了它们的多尺度摩擦行为。结果表明，在16 mA / cm ²的离子辐照密度下，sp ²纳米晶化的碳膜在宏观和微观上均表现出最低的摩擦系数和良好的耐磨性。薄膜在Si ₃ N _4上滑动球在接触压力为0.57 GPa的情况下表现出低摩擦系数0.09和长寿命的宏观磨损。此外，在4.9 GPa的接触压力下在金刚石尖端上滑动的薄膜表现出0.08的稳定低摩擦系数，在微尺度上具有浅的划痕深度。建议在描述的情况下，sp ²纳米微晶对摩擦性能的影响不同。在宏观上，通过小的实际接触面积和sp ²纳米晶化的转移层的接触界面主导了摩擦行为，而sp ²具有低剪切强度和高塑性电阻率的薄膜中的纳米晶结构以及光滑的表面形态决定了微观尺度上稳定的低纳米划痕性能。这些发现扩展了sp ²纳米晶碳膜的多尺度摩擦学应用。