Light scattering from residual manufacturing errors of optical surfaces has a large impact on the image quality of optical systems. Classical ray-based methods to simulate surface scattering in optical systems depend on statistical models of surface errors and neglect the wave properties of light, which prohibit the integration of statistical surface error models with beam propagation methods. Additionally, the impact of multiple scattering from different frequency components of surface errors cannot be easily modelled by existing methods. Here we analyze the impact of different frequency components of surface errors induced by diamond-turned surface grinding on image quality, and we propose a Wigner function-based approach in which light is modelled as partially coherent. In this unified model, by selecting the proper definition of light coherence, we can combine the statistical and deterministic models of surface errors, enabling efficient, simultaneous simulation of multiple scattering from high- and mid-spatial frequency (HSF and MSF, respectively) surface errors, as well as the interference and edge diffraction of light.

中文翻译：

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基于Wigner函数的具有相干表面的光学系统中部分相干光的建模和传播

来自光学表面的残留制造误差的光散射对光学系统的图像质量有很大影响。在光学系统中模拟表面散射的经典基于射线的方法依赖于表面误差的统计模型，而忽略了光的波特性，这阻碍了统计表面误差模型与光束传播方法的集成。另外，现有方法不能轻易地模拟来自表面误差的不同频率分量的多重散射的影响。在这里，我们分析了金刚石车削表面磨削引起的表面误差的不同频率分量对图像质量的影响，并提出了一种基于Wigner函数的方法，其中将光建模为部分相干。在这个统一模型中