Performing EBSD with a horizontal sample and a parallel EBSD detector sensor, enables safer specimen movements for data collection of large specimen areas and improves the longitudinal spatial resolution. The collection of electron backscattering patterns (EBSPs) at normal incidence to the electron beam has been revisited via the use of a direct electron detection (DED) sensor. In this article we present a fully operational DED EBSD detection system in this geometry, referred to as the tilt-free geometry. A well-defined Σ=3[101]{121} twin boundary in a Molybdenum bicrystal was used to measure the physical spatial resolution of the EBSD detector in this tilt-free geometry. In this study, two separate methods for estimating the spatial resolution of EBSD, one based on a pattern quality metric and the other on a normalised cross correlation coefficient were used. The spatial resolution was determined at accelerating voltages of 8 kV, 10 kV, 12 kV, 15 kV and 20 kV ranging from ~22−38 nm using the pattern quality method and ~31−46 nm using the normalised cross correlation method.

使用水平样品和平行EBSD检测器传感器执行EBSD，可以更安全地移动样品，以用于大面积样品的数据收集，并提高纵向空间分辨率。已经通过使用直接电子检测（DED）传感器重新研究了与电子束垂直入射的电子反向散射图案（EBSP）的收集。在本文中，我们介绍了一种完全可操作的DED EBSD检测系统，该系统称为这种无倾斜几何形状。钼双晶体中定义明确的Σ= 3 [101] {121}孪晶边界用于测量这种无倾斜几何形状的EBSD检测器的物理空间分辨率。在这项研究中，有两种单独的方法来估算EBSD的空间分辨率，一个基于模式质量度量，另一个基于归一化互相关系数。空间分辨率是使用模式质量方法在〜22-38 nm范围内和使用归一化互相关方法在〜31-46 nm范围内的8 kV，10 kV，12 kV，15 kV和20 kV加速电压下确定的。