In this work, Z-axis MEMS accelerometers are investigated with variation in spring topography. The serpentine spring structure demonstrated the optimum sensitivity of MEMS accelerometers due to a large number of beams that reduce the spring constant considerably. The augmented serpentine spring MEMS accelerometers are simulated for SU-8, PolySi, Si₃N_4, and SiC-based primary structural materials. SU-8 based MEMS accelerometer shows high sensitivity and cost-effective fabrication process suitable for industry. The reliability of the microaccelerometers is investigated by the stress analysis. The computation result of designed accelerometers exhibited a linear response up to ± 50 g of the input value of acceleration. For the integration with Si-technology, SU-8 microaccelerometer with serpentine spring structure is fabricated using facile maskless lithography based grayscale process technology. The sensitivity is measured by capacitance variation with Z-axis free falls. The frequency response and spring constant of fabricated SU-8 based Z-axis MEMS accelerometer is investigated by Laser Doppler Vibrometer and nanoindentation technique, respectively. The demonstrated SU-8 serpentine spring, highly sensitive, facile and low-cost process technology-based Z-axis accelerometer is suitable for navigation, space, and medical applications.

在这项工作中，研究了Z轴MEMS加速度计的弹簧形貌变化。蜿蜒的弹簧结构展示了MEMS加速度计的最佳灵敏度，这是由于大量光束大大降低了弹簧常数。增强型蛇形弹簧MEMS加速度计针对SU-8，PolySi，Si ₃ N ₄进行了仿真和SiC基主要结构材料。基于SU-8的MEMS加速度计显示出高灵敏度和适用于工业的经济有效的制造工艺。通过应力分析研究了微加速度计的可靠性。设计的加速度计的计算结果显示出高达加速度输入值±50 g的线性响应。为了与硅技术集成，使用基于灰度处理技术的简便无掩模光刻技术制造了具有蛇形弹簧结构的SU-8微加速度计。灵敏度是通过Z轴自由落体的电容变化来衡量的。利用激光多普勒振动计和纳米压痕技术分别研究了基于SU-8的Z轴MEMS加速度计的频率响应和弹簧常数。演示过的SU-8蛇形弹簧，