Ternary hard coatings like TiAlN and CrAlN are used to improve the tool lifetime during cutting. The addition of silicon leads to a nanocomposite coating architecture with advantageous properties, like a higher oxidation stability and higher indentation hardness. The coating system TiAlCrSiON is a combination of TiAlN and CrAlN with added oxygen: This coating is not sufficiently studied yet. However, it has a great potential to improve the cutting performance and tool lifetime. In the current study, three different TiAlCrSiON nanolayer coatings were deposited by direct current magnetron sputtering/high power pulsed magnetron sputtering hybrid processes on an industrial coating unit using three different gas flow ratios of oxygen to nitrogen. Bases on these coatings the influence of the incorporation of oxygen into the TiAlCrSiON coatings on the coating process and properties as well as on the thermal and oxidation stability is studied. The morphology of the coatings was investigated by scanning electron microscopy and transmission electron microscopy. It becomes increasingly columnar, when oxygen is incorporated into the coating. The phase composition was examined by X-ray diffraction. The results indicate an incorporation of oxygen into the cubic crystal lattice. The coatings show a nanocomposite and a nanolayer coating architecture. The oxygen is distributed inhomogeneously over the coating thickness and homogeneously within the nanolayers. Moreover, the coatings were investigated by nanoindentation. When the oxygen content increases, the indentation hardness decreases from H_IT = (34 ± 2) GPa for the nitride Ti₂₁Al₁₇Cr₅Si₃N₅₄ coating to H_IT = (26 ± 2) GPa for the oxynitride Ti₂₃Al₁₃Cr₅Si₃O₂₁N₃₅ coating with a high oxygen content. The coatings show a high phase stability even at T = 1200 °C. The oxidation stability of the oxynitride coating with a high oxygen content is decreased T = 900 °C compared to the nitride coating.

三元硬质涂层（如TiAlN和CrAlN）用于延长切削过程中的刀具寿命。硅的添加导致纳米复合涂层结构具有有利的特性，例如更高的氧化稳定性和更高的压痕硬度。TiAlCrSiON涂层系统是TiAlN和CrAlN与添加的氧气的组合：该涂层尚未得到足够的研究。但是，它具有改善切削性能和刀具寿命的巨大潜力。在当前的研究中，使用氧与氮的三种不同气体流量比，通过直流磁控溅射/高功率脉冲磁控溅射混合工艺在工业涂层装置上沉积了三种不同的TiAlCrSiON纳米层涂层。基于这些涂层，研究了将氧气掺入TiAlCrSiON涂层中对涂层工艺，性能以及热稳定性和氧化稳定性的影响。通过扫描电子显微镜和透射电子显微镜研究涂层的形态。当氧气结合到涂层中时，它变得越来越柱状。通过X射线衍射检查相组成。结果表明氧掺入了立方晶格。涂层显示出纳米复合材料和纳米层涂层结构。氧不均匀地分布在涂层厚度上，并且均匀地分布在纳米层内。此外，通过纳米压痕研究了涂层。当氧含量增加时，压痕硬度从H降低 通过扫描电子显微镜和透射电子显微镜研究涂层的形态。当氧气结合到涂层中时，它变得越来越柱状。通过X射线衍射检查相组成。结果表明氧掺入了立方晶格。涂层显示出纳米复合材料和纳米层涂层结构。氧不均匀地分布在涂层厚度上，并且均匀地分布在纳米层内。此外，通过纳米压痕研究了涂层。当氧含量增加时，压痕硬度从H降低 通过扫描电子显微镜和透射电子显微镜研究涂层的形态。当氧气结合到涂层中时，它变得越来越柱状。通过X射线衍射检查相组成。结果表明氧掺入了立方晶格。涂层显示出纳米复合材料和纳米层涂层结构。氧不均匀地分布在涂层厚度上，并且均匀地分布在纳米层内。此外，通过纳米压痕研究了涂层。当氧含量增加时，压痕硬度从H降低 结果表明氧掺入了立方晶格。涂层显示出纳米复合材料和纳米层涂层结构。氧不均匀地分布在涂层厚度上，并且均匀地分布在纳米层内。此外，通过纳米压痕研究了涂层。当氧含量增加时，压痕硬度从H降低 结果表明氧掺入了立方晶格。涂层显示出纳米复合材料和纳米层涂层结构。氧不均匀地分布在涂层厚度上，并且均匀地分布在纳米层内。此外，通过纳米压痕研究了涂层。当氧含量增加时，压痕硬度从H降低 对于氮化钛Ti ₂₁ Al ₁₇ Cr ₅ Si ₃ N ₅₄涂层，_IT =（34±2）GPa至H 的氮化钛Ti ₂₃ Al ₁₃ Cr ₅ Si ₃ O ₂₁ N ₃₅涂层的_IT =（26±2）GPa。氧含量高。涂层即使在T  = 1200°C时也显示出高的相稳定性。 与氮化物涂层相比，具有高氧含量的氧氮化物涂层的氧化稳定性降低了T = 900°C。