In this paper, a high-efficiency self-calibration method was proposed, which was successfully applied to the ultra-precision air-bearing motion stage. Firstly, digital grating focusing, camera vision measurement and position synchronous output signal control were integrated, which can effectively improve the acquisition accuracy of stage positional data. Then, based on the least square algorithm the systematic error compensation value of motion stage can be quickly obtained through the fitting processing of three different measurement views. The experimental results showed that the proposed self-calibration measurement system can successfully realize ultra-precision air-bearing stage accurate location, and the orthogonality and shrinkage were controlled within 1 arcsec and 300 nm, respectively. This compensation method can effectively avoid the problems of high cost and poor environmental anti-interference in the laser interferometer measurement system, and will have a broad application prospect in the fields of high-end lithography and ultra-precision machining.

提出了一种高效的自校准方法，该方法已成功地应用于超精密空气轴承运动平台。首先，集成了数字光栅聚焦，摄像机视觉测量和位置同步输出信号控制，可以有效地提高载物台位置数据的采集精度。然后，基于最小二乘算法，可以通过对三个不同测量视图的拟合处理，快速获得运动平台的系统误差补偿值。实验结果表明，所提出的自校准测量系统能够成功实现超精密载气台的精确定位，正交性和收缩率分别控制在1 arcsec和300 nm以内。