The present study aimed to apply laser back-writing for fabricating micro-channels. First, a $Q$-switched Nd:YAG laser with fundamental wavelength was used, and a steel target was ablated and evaporated onto a quartz substrate by focusing the laser pulses on the target through the quartz substrate. Then, micro-channels on the quartz were machined with laser-ablated plasma interaction with the substrate. In addition, the surface plasma ablated region was characterized by scanning electron microscopy, a surface profilometer, and energy dispersive x-ray spectrometry. Finally, UV-Vis spectroscopy was used to measure the presence of metal nanoparticles with their typical surface plasmon resonance bands on the interaction area.

中文翻译：

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钢的激光回写，用于在石英基板上制造微通道

本研究旨在将激光回写应用于制造微通道。首先，使用具有基本波长的$ Q $开关的Nd：YAG激光器，通过将激光脉冲聚焦在穿过石英​​基板的目标上，将钢靶烧蚀并蒸发到石英基板上。然后，在石英上的微通道通过激光烧蚀与基板的等离子体相互作用进行加工。另外，通过扫描电子显微镜，表面轮廓仪和能量色散X射线光谱法对表面等离子体烧蚀区域进行了表征。最后，使用紫外-可见光谱法测量在相互作用区域上具有典型表面等离振子共振带的金属纳米粒子的存在。