This article reports a new concept of surface-acoustic-wave (SAW) resonator, which uses shear horizontal (SH) wave confined in a thin LiTaO ₃ (LT) layer supported by a quartz (Qz) substrate. The LT layer is 35–50°YX LT, and the quartz substrate is 35–60°Y90°X Qz. A negative temperature coefficient of frequency (TCF) of the SH SAW in the LT layer is compensated by the quartz substrate, which shows a wide range of positive TCF depending on the crystalline orientation. Excellent TCFs of 2 and −10 ppm/°C were measured for the series and parallel resonance frequencies, respectively. The strong confinement of the SH SAW in the LT layer results in the best level of resonance characteristics ever reported. The measured impedance ratio reached 84 dB. On the other hand, spurious waves other than the SH SAW are not confined in the LT layer due to the unique properties of quartz, which results in spurious-free characteristics throughout a wide frequency range.

中文翻译：

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钽酸锂和石英具有杂声层（HAL）结构的表面声波谐振器

本文报道了表面声波（SAW）谐振器的新概念，它使用了限制在薄的LiTaO _3中的水平剪切（SH）波。 由石英（Qz）基板支撑的（LT）层。LT层为35–50°YX LT，石英基板为35–60°Y90°X Qz。LT层中SH SAW的负温度频率系数（TCF）由石英衬底补偿，根据晶体取向，它显示出宽范围的正TCF。对于串联和并联谐振频率，分别测得2和-10 ppm /°C的出色TCF。SH声表面波在LT层中的强力限制导致了有史以来最好的共振特性水平。测得的阻抗比达到84 dB。另一方面，由于石英的独特特性，除了SH SAW以外的杂散波并未限制在LT层中，这导致了在很宽的频率范围内无杂散的特性。