Miniaturization of millimeter-wave (mm-wave) filters relies on innovative designs that require fine lines and spacings. These designs drive the need for precision fabrication that cannot be achieved with traditional laminates or cofired ceramics. This gives unique performance justification to glass substrate technologies for future integrated mm-wave components because of both superior performance and 3– $5\times $ reduction in volume. In this letter, laminated glass-based compact inline stepped-impedance resonator (SIR) filters are presented for 5G new radio (NR) modules. The frequency bands of interest are 5G NR bands: n257 and n260. The filters are designed using microstrip transmission lines with the fourth-order quasi-elliptic response with skew-symmetric feed. The enhanced transition responses of these filters provide transmission zeros (TZs) on either side of the passband. When these filters are designed for mm-wave applications, their dependence on the accuracy of metal patterns increases significantly due to narrow linewidth and spacing requirements to realize moderate fractional bandwidths. Two inline SIR filters are fabricated using a large-area, panel-compatible semiadditive patterning (SAP) process on precision redistribution layers (RDLs) of a laminated glass substrate stack up. The sensitivity of these filters to the dimensional variations of patterned copper is analyzed, and the discrepancy between simulated and measured response of the filters is studied by performing postfabrication simulations.

中文翻译：

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基于层压玻璃的紧凑型串联步进阻抗谐振器带通滤波器，用于5G新型无线电模块

毫米波滤波器的小型化依赖于需要细线和间距的创新设计。这些设计推动了对精密制造的需求，而这是传统层压板或共烧陶瓷无法实现的。由于具有卓越的性能和3– $ 5 \次$ 减少体积。在这封信中，展示了用于5G新型无线电（NR）模块的基于层压玻璃的紧凑型串联步进阻抗谐振器（SIR）滤波器。感兴趣的频段是5G NR频段：n257和n260。滤波器是使用微带传输线设计的，具有带对称偏斜馈源的四阶准椭圆响应。这些滤波器增强的过渡响应可在通带的任一侧提供零传输（TZ）。当这些滤波器设计用于毫米波应用时，由于狭窄的线宽和间距要求以实现中等分数带宽，它们对金属图案精度的依赖性大大增加。使用大面积制造了两个串联SIR滤波器，层压玻璃基板的精密再分布层（RDL）上的面板兼容半添加图案（SAP）工艺。分析了这些滤波器对图案化铜的尺寸变化的敏感性，并通过进行后制造仿真研究了滤波器的仿真响应和测量响应之间的差异。