Cold Gas Micro Propulsion (CGMP) is a reliable technology for spacecraft attitude and orbit control used in drag-free control system to compensate the environmental disturbance from the aerospace. The CGMP requiring a very fine control resolution and low noise is desired to be used on TAIJI mission for gravitational wave detection which is supported by Chinese Academy of Science (CAS). One of CGMP’s key technologies is high-resolution Gas Mass Flow Sensor (GMFS). In this paper, calorimetric thermal flow sensor characterized with miniaturization, high sensitivity and low noise is studied by simulation method and manufacturing process. By simulating the influence of heating power, electrode distance, temperature, etc. on sensor response, the methods on optimizing sensitivity and accuracy have been proposed. The sensitivity is about 2.53 mV/(m/s)/mW. An amplifier circuit with ultra-low noise of 7.29 nV/√Hz for reading out has been designed, which is essential for high resolution. The sensor was fabricated and preliminary tests have been conducted. The sensitivity of the sensor is about 100 mV/(m/s).

中文翻译：

---

用于冷气微推进系统的高分辨率流量传感器设计

冷气微推进（CGMP）是一种可靠的航天器姿态和轨道控制技术，用于无阻力控制系统，以补偿来自航天的环境干扰。中科院支持的太极引力波探测任务需要非常精细的控制分辨率和低噪声的CGMP。CGMP 的一项关键技术是高分辨率气体质量流量传感器 (GMFS)。本文通过仿真方法和制造工艺研究了具有小型化、高灵敏度和低噪声的量热式热流量传感器。通过模拟加热功率、电极距离、温度等对传感器响应的影响，提出了优化灵敏度和精度的方法。灵敏度约为 2.53 mV/(m/s)/mW。√设计了用于读出的Hz，这对于高分辨率是必不可少的。传感器已制作完成并进行了初步测试。传感器的灵敏度约为 100 mV/(m/s)。