An electronegative collisional plasma having warm and massive positive ions, non-extensive distributed electrons and Boltzmann distributed negative ions is modelled for the plasma-surface interaction process that is used for the surface nitriding. Specifically the sheath formation is evaluated through the Bohm’s criterion, which is found to be modified, and the variation of the sheath thickness and profiles of the density of plasma species and the net space charge density in the sheath region in addition to the electric potential. The effect of ion temperature, non-extensivity and collisional parameter is examined in greater detail considering the collisional cross-section to obey power-law dependency on the positive ion velocity. The positive ions are found to enter in the sheath region at lower velocities in the collisional plasma compared to the case of collision-less plasma; this velocity sees minuscule reduction with increasing non-extensivity. The increasing ion temperature and collisional parameter lead to the formation of sheath with smaller thickness.

对用于表面氮化的等离子体-表面相互作用过程建模具有温暖和大量正离子、非广泛分布的电子和玻尔兹曼分布的负离子的负电碰撞等离子体。具体地，鞘形成通过发现被修改的玻姆准则以及鞘厚度的变化以及鞘区域中的等离子体物质密度和净空间电荷密度的分布以及电势来评估。考虑到碰撞截面服从正离子速度的幂律依赖性，更详细地检查了离子温度、非延展性和碰撞参数的影响。与无碰撞等离子体的情况相比，发现正离子在碰撞等离子体中以较低的速度进入鞘区；随着非扩展性的增加，这种速度会出现微小的下降。离子温度和碰撞参数的增加导致形成更薄的鞘层。