Gas detection has become an indispensable part of the power equipment maintenance. Because of many advantages, cantilever enhanced photoacoustic(PA) spectroscopy was studied by many researchers. In this paper, with the help of Finite Element Method (FEM) simulations with the commercial software COMSOL, we have analyzed the distribution of the sound pressure inside the gas cell, in addition, we have analyzed the relationship between the Young’s modulus and size of the cantilever beam and its deformation, the relationship between the cantilever size and its eigen-frequencies were also obtained. Besides, we have performed the experiment of the deformation measurement. The results show that: for the gas cell, when it works at the first order resonance frequency, the maximum value of the sound pressure appears at the geometric center. For the main resonance cavity, with its length and radius increase, the first order resonance frequency of the gas cell decreases. Under the condition of ideal linear sound source, as the length and radius of the main resonance cavity changes, in the frequency domain, the sound pressure response curve changes, the maximum sound pressure corresponds the PA cell with 85 mm in length and 2 mm in radius. For the cantilever beam, with the increase of the Young’s modulus, the deformation decreases. The deformation is proportional to the fourth power of the length, whereas it is inversely proportional to the width and inversely proportional to the third power of the thickness. However, the experimental results showed that there may be a deviation in the vibration measurements by the vibration meter. As for the first order eigen-frequency, it is negatively correlated with the length and positively correlated with the thickness, but independent of the width. With the increase of the distance between the sound source and the cantilever beam, the deformation decreases.

气体检测已成为电力设备维护中不可或缺的一部分。由于许多优点，悬臂增强光声（PA）光谱被许多研究人员研究。在本文中，借助商业软件 COMSOL 的有限元法 (FEM) 模拟，我们分析了气室内部的声压分布，此外，我们还分析了杨氏模量与尺寸之间的关系。还得到了悬臂梁及其变形、悬臂尺寸与其本征频率之间的关系。此外，我们还进行了变形测量的实验。结果表明：对于气室，当它工作在一阶共振频率时，声压的最大值出现在几何中心。对于主谐振腔，随着其长度和半径的增加，气室的一阶谐振频率降低。在理想线性声源条件下，随着主谐振腔的长度和半径的变化，在频域上，声压响应曲线发生变化，最大声压对应长85mm、长2mm的PA单元半径。对于悬臂梁，随着杨氏模量的增加，变形量减小。变形与长度的四次方成正比，而与宽度成反比，与厚度的三次方成反比。然而，实验结果表明，振动计的振动测量值可能存在偏差。对于一阶特征频率，它与长度呈负相关，与厚度呈正相关，但与宽度无关。随着声源与悬臂梁距离的增加，变形减小。