Bottom-up grown single-crystalline silicon nanowires (SiNWs) are highly intriguing to build nanoscale probes, for instance for atomic force microscopy (AFM), due to their mechanical robustness and high aspect ratio geometry. Several strategies to build such nanowire-equipped probes were explored but their fabrication is still elaborate, time-consuming and relies partly on single-crystalline substrates. Here, we explore a new strategy to fabricate AFM probes that are equipped with single-SiNW scanning tips. The conceptual evaluation begins with a discussion on the overall design and softness of such probes based on finite-element-method simulations. For the experimental realization, SiNWs were grown by the well-established gold-catalyzed vapor–liquid–solid method employing gaseous monosilane. As-grown SiNWs were subsequently transferred onto flexible membranes and even freestanding AFM microcantilever beams via mechanical nanowire contact printing. Elongation of the deposited nanowires by so-called regrowth was triggered by reusing the original gold catalyst to yield the prospective AFM scanning tip. SiNW-equipped scanning probes were created in this manner and were successfully employed for topography imaging. Although a multitude of challenges remains, the created probes showed an overall convincing performance and a superior durability.

自下而上生长的单晶硅纳米线 (SiNW) 由于其机械坚固性和高纵横比几何形状，对于构建纳米级探针非常有吸引力，例如用于原子力显微镜 (AFM)。探索了几种构建这种配备纳米线的探针的策略，但它们的制造仍然复杂、耗时，并且部分依赖于单晶基板。在这里，我们探索了一种制造配备单 SiNW 扫描尖端的 AFM 探针的新策略。概念评估首先讨论基于有限元方法模拟的此类探针的整体设计和柔软度。为了实验实现，SiNWs 是通过使用气态甲硅烷的成熟的金催化气-液-固法生长的。随后通过机械纳米线接触印刷将生长的 SiNW 转移到柔性膜甚至独立的 AFM 微悬臂梁上。通过重新使用原始的金催化剂来产生预期的 AFM 扫描尖端，从而触发了所谓的再生长沉积纳米线的伸长。以这种方式创建了配备 SiNW 的扫描探针，并成功地用于地形成像。尽管仍然存在许多挑战，但所创建的探针显示出令人信服的整体性能和卓越的耐用性。以这种方式创建了配备 SiNW 的扫描探针，并成功地用于地形成像。尽管仍然存在许多挑战，但所创建的探针显示出令人信服的整体性能和卓越的耐用性。以这种方式创建了配备 SiNW 的扫描探针，并成功地用于地形成像。尽管仍然存在许多挑战，但所创建的探针显示出令人信服的整体性能和卓越的耐用性。