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Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systemsThis article belongs to the Special issue: Emerging Leaders, which features invited work from the scope of J. Micromech. Microeng. Kaikai Xu was selected by the Editorial Board of J. Micromech. Microeng. as an Emerging Leader.
Journal of Micromechanics and Microengineering ( IF 2.4 ) Pub Date : 2021-04-07 , DOI: 10.1088/1361-6439/abf333
Kaikai Xu

In this paper, optoelectronic characteristics and related switching behavior of one monolithically integrated silicon light-emitting device (LED) with an interesting wavelength range of 400–900 nm are studied. Through the comparison of two types of geometry, Si avalanche-based LED and Si field-effect LED (Si FE LED), in the same device, we establish the dimensional dependence of the switching speed of the LED. Almost-linear modulation curve implies lower distortion is shown for the Si FE LED with light emission enhancement, and technology computer aided design (TCAD) simulations are in line with the experimental results. Our findings indicate that ON–OFF keying up to GHz frequencies should be feasible with such diodes. Potential applications should include Si FE LED integrated into the micro-photonic systems.



中文翻译:

采用标准 CMOS 技术制造的硅电光微调制器作为所有硅单片集成光电系统的组件本文属于特刊:新兴领导者,其中包含 J. Micromech 范围内的特邀工作。微工程。徐开凯被 J. Micromech 编委会选中。微工程。作为新兴领导者。

在本文中,研究了一个有趣的波长范围为 400-900 nm 的单片集成硅发光器件 (LED) 的光电特性和相关的开关行为。通过在同一器件中比较基于 Si 雪崩的 LED 和 Si 场效应 LED (Si FE LED) 两种几何形状,我们建立了 LED 开关速度的尺寸依赖性。几乎线性的调制曲线意味着具有光发射增强的 Si FE LED 显示出较低的失真,并且技术计算机辅助设计 (TCAD) 模拟与实验结果一致。我们的研究结果表明,使用此类二极管可以实现高达 GHz 频率的开关键控。潜在应用应包括集成到微光子系统中的 Si FE LED。

更新日期:2021-04-07
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