In this paper, the formation of the electron energy distribution function (EEDF) in the argon dusty plasma of the positive column of glow discharge at low pressure is investigated. A model for calculating EEDF in the local approximation is adapted to find the nonlocal EEDF via the Holstein–Tsendin model. The results show that, contrary to the prevalent opinion in the literature, the presence of dust has little effect on the EEDF up to the limiting values of the density of dust particles that can be injected into the plasma for the considered conditions. It is also shown that, when obtaining the nonlocal EEDF, the spatial profiles of the axial (heating) and radial (ambipolar) fields should be chosen from a self-consistent solution. Additionally, the differences between the local and nonlocal EEDFs increase in the peripheral regions of the discharge due to a sharp decrease of fast electrons in the nonlocal case. Significant changes in the form of the nonlocal EEDF along the radius also lead to noticeable changes in other characteristics of the electrons in this area, especially for those with a large energy threshold (e.g. due to excitation, ionization).

本文研究了低压下辉光放电正极柱的氩尘等离子体中电子能量分布函数(EEDF)的形成。在局部近似中计算 EEDF 的模型适用于通过 Holstein-Tsendin 模型找到非局部 EEDF。结果表明，与文献中的普遍观点相反，灰尘的存在对 EEDF 几乎没有影响，直到在所考虑的条件下可以注入等离子体的灰尘颗粒密度的极限值。还表明，在获得非局部 EEDF 时，应从自洽解中选择轴向（加热）和径向（双极）场的空间分布。此外，由于在非局部情况下快速电子的急剧减少，局部和非局部 EEDF 之间的差异在放电的外围区域增加。沿半径的非局部 EEDF 形式的显着变化也导致该区域电子的其他特性发生显着变化，特别是对于那些具有大能量阈值（例如由于激发、电离）的电子。