The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.

中文翻译：

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用于等离子体离子能量控制的正偏置外部阳极：空心阴极和磁控溅射放电

研究了正偏置外环阳极与空心阴极 (HC) 放电或磁控溅射 (MS) 放电相结合的性能，两者均使用 Ti 阴极和 Ar 作为工作气体。等离子体和浮动电位随阳极电压而增加。能量分辨质谱表明，正阳极电压增强了氩离子和钛离子的动能，从而可以有效控制等离子体离子的能量。