This work reports on the correlation between structure, surface/interface morphology and mechanical properties of pulsed laser deposited (PLD) β-Ga₂O₃ films on transparent quartz substrates. By varying the deposition temperature in the range of 25 C–700 C, ∼200 nm thick Ga₂O₃ films with variable microstructure and amorphous-to-nanocrystalline nature were produced onto quartz substrates by PLD. The Ga₂O₃ films deposited at room temperature were amorphous; nanocrystalline Ga₂O₃ films were realized at 700 C. The interface microstructure is characterized with a typical nano-columnar morphology while the surface exhibits the uniform granular morphology. Corroborating with structure and surface/interface morphology, and with increasing deposition temperature, tunable mechanical properties were seen in PLD Ga₂O₃ films. At 700 C, for nanocrystalline Ga₂O₃ films, the dense grain packing reduces the elastic modulus E_r while improving the hardness. The improved crystallinity at elevated temperatures coupled with nanocrystallinity, the β-phase stabilization is accounted for the observed enhancement in the mechanical properties of PLD Ga₂O₃ films. The structure-morphology-mechanical property correlation in nanocrystalline PLD β-Ga₂O₃ films deposited on quartz substrates is discussed in detail.

这项工作报告了透明石英基板上脉冲激光沉积 (PLD) β -Ga ₂ O ₃薄膜的结构、表面/界面形态和机械性能之间的相关性。通过在 25 C–700 C 范围内改变沉积温度，通过 PLD 在石英衬底上产生了约200 nm 厚的具有可变微观结构和非晶到纳米晶性质的Ga ₂ O ₃薄膜。室温沉积的Ga ₂ O ₃薄膜为非晶态；纳米晶 Ga ₂ O ₃薄膜在 700 C 下实现。界面微结构具有典型的纳米柱状形态，而表面则表现出均匀的颗粒形态。证实了结构和表面/界面形态，并且随着沉积温度的升高，在 PLD Ga ₂ O ₃薄膜中看到了可调的机械性能。在700℃时，对于纳米晶Ga ₂ O ₃薄膜，致密的晶粒堆积降低了弹性模量E _{r ，}同时提高了硬度。在升高的温度下改善的结晶度与纳米结晶度相结合，β相稳定是观察到的 PLD Ga ₂ O机械性能增强的原因₃部电影。详细讨论了沉积在石英衬底上的纳米晶PLD β -Ga ₂ O ₃薄膜的结构-形态-机械性能相关性。