Surface potential contrasts were measured for n-type silicon (111) modified with 1-alkene self-assembled monolayers (SAMs) of varying hydrocarbon chain lengths (n=10–20) using Kelvin probe force microscopy (KPFM). Micropatterned SAMs were used in KPFM analysis, with hexadecyl SAM acting as a reference to avoid possible variations due to different KPFM cantilever tips used for analysis. Micropatterning was performed via vacuum ultraviolet photolithography at λ=172nm. Individual samples were also analyzed by ellipsometry, X-ray photoelectron spectroscopy, static water contact angle tests and atomic force microscopy to determine SAM quality. Surface potential changes observed between the different SAMs were attributed to differences in the dipole moment of the precursor molecules, changes in SAM dielectric properties due to differences in molecular packing, and varying oxygen content at the surface.

使用开尔文探针力显微镜 (KPFM) 测量了用不同烃链长度 ( n = 10-20) 的1-烯烃自组装单分子层 (SAM) 改性的 n 型硅 (111) 的表面电位对比。微图案 SAM 用于 KPFM 分析，十六烷基 SAM 作为参考，以避免由于用于分析的不同 KPFM 悬臂尖端而可能发生的变化。通过真空紫外光刻在λ处进行微图案化=172nm。还通过椭偏仪、X 射线光电子能谱、静态水接触角测试和原子力显微镜分析了单个样品，以确定 SAM 质量。在不同 SAM 之间观察到的表面电位变化归因于前体分子偶极矩的差异、由于分子堆积差异导致的 SAM 介电特性的变化以及表面氧含量的变化。