Zinc oxide (ZnO) nanorods were grown on rigid substrate (fluorine doped tin oxide, FTO) with different molar concentrations (0.025, 0.075 and 0.125 M) using a low-temperature hydrothermal process. The XRD analysis revealed the formation of hexagonal wurtzite structured ZnO nanorods with (002) plane c-axis orientation of the samples. Morphological analysis by the FESEM method confirmed the formation of ZnO nanorods with hexagonal top surfaces. The electrical properties of the fabricated devices were identified using photoconductivity and impedance studies. Less internal resistance of 1.12 kΩ, turn on the voltage of 0.46 V for 0.075 M sample depicted better piezoelectric property. At 9 Hz resonant frequency, a maximum voltage of 2.13 V and for 1 g acceleration input, the output voltage obtained was 2.49 V for 0.075 M sample which is better than the other two precursors molar concentration varied samples (0.025 and 0.125 M). The sensitivity of this sample was found to be ∼3.05 V/g.

使用低温水热工艺在不同摩尔浓度（0.025、0.075 和 0.125 M）的刚性基底（氟掺杂氧化锡，FTO）上生长氧化锌（ZnO）纳米棒。XRD分析揭示了具有(002)面c的六方纤锌矿结构ZnO纳米棒的形成- 样品的轴方向。FESEM 方法的形貌分析证实了具有六边形顶面的 ZnO 纳米棒的形成。使用光电导性和阻抗研究来确定所制造器件的电性能。0.075 M样品的内阻较小，为1.12 kΩ，开启电压为0.46 V，表现出更好的压电性能。在 9 Hz 共振频率、最大电压 2.13 V 和 1 g 加速度输入下，0.075 M 样品获得的输出电压为 2.49 V，优于其他两种前体摩尔浓度变化的样品（0.025 和 0.125 M）。该样品的灵敏度为 ∼3.05 V/g。