ABSTRACT

High-aspect-ratio cylindrical tungsten microtools were fabricated through the electrochemical micro-machining (µECM) process. The effects of eight different electrolytes in combination with the different major machining parameters were investigated and reported in this article. KOH(aq) electrolyte was found to be the most suitable electrolyte for the fabrication of tungsten microelectrodes. The Taguchi technique was utilized for optimizing the major process control parameters to minimize the taper angle of the fabricated micro-tools. During the tool fabrication process, the deposited electrochemical reaction on the tool surface played an important role to achieve controlled dissolution of the tool materials and helped in producing a uniform surface. The microtools of diameter 40 µm with aspect-ratio of about 175 were fabricated with the optimal settings of dominant machining parameters. The fabricated microtools were used to drill through drill-holes on a nickel plate of thickness 1050 µm using the same µECM setup. The detailed experimental investigations are carried out and conclusive remarks are drawn based on the experimental results.

摘要

高纵横比圆柱形钨微型工具是通过电化学微加工 (μECM) 工艺制造的。本文研究并报告了八种不同电解质结合不同主要加工参数的影响。发现 KOH(aq) 电解质是最适合制造钨微电极的电解质。田口技术用于优化主要工艺控制参数，以最大限度地减少制造的微型工具的锥角。在工具制造过程中，工具表面上沉积的电化学反应在实现工具材料的受控溶解方面发挥了重要作用，并有助于产生均匀的表面。直径为 40 µm、纵横比约为 175 的微型工具是在主要加工参数的最佳设置下制造的。使用相同的 µECM 设置，使用制造的微型工具在厚度为 1050 µm 的镍板上钻通钻孔。进行了详细的实验研究，并根据实验结果得出结论性意见。