In this paper, a metal–insulator–metal plasmonic sensor with one rectangular and two square nanorod array resonators that shows a Fano resonance is analyzed and suggested. The finite difference time domain method is used to investigate the output spectra and sensing characteristics. The transmission spectra show a sharp and asymmetric shape, because of the narrow-band spectrum and broad-band one affected by two square resonators and rectangular cavity. The coupled mode theory is used to describe the Fano resonance effect. The Fano resonance shows a notable red shift with an increasing dielectric material refractive index. The results show that with optimizing the physical parameters, the sensitivity is attained 1090 nm/RIU, and water and Ethanol temperature sensitivities are achieved as high as 0.087 nm/ °C and 0.475 nm/ °C, respectively. The corresponding figure of merit value is 2 × 10⁴ RIU⁻¹. The proposed structure can be used in photonic integrated devices to perform the sensing operation.

在本文中，分析并提出了具有一个矩形和两个方形纳米棒阵列谐振器的金属-绝缘体-金属等离子体传感器，并显示了Fano谐振。时域有限差分法用于研究输出光谱和传感特性。由于窄带频谱和宽带频谱受到两个方形谐振器和矩形腔的影响，因此传输频谱显示出尖锐且不对称的形状。耦合模式理论用于描述Fano共振效应。Fano共振随着介电材料折射率的增加显示出明显的红移。结果表明，通过优化物理参数，可以达到1090 nm / RIU的灵敏度，对水和乙醇的温度灵敏度分别达到0.087 nm /°C和0.475 nm /°C。⁴ RIU ^-1。所提出的结构可以用于光子集成设备中以执行感测操作。