Particles and cells can be patterned and moved (i.e., manipulated) precisely using acoustically driven techniques. To date, application of acoustic particle manipulation has been limited to plain surfaces. There is much potential for applying acoustic manipulation techniques to surfaces with microfabricated structures for high-throughput sensing. But adding thin film structures could alter manipulation characteristics compared to a plain surface. Using a two-chip setup that allows the wave generating device to be reused, we study the feasibility of acoustofluidic micro-manipulation on a surface-micromachined silicon (SMS) chip. The SMS chip is a complex superstrate with generic thin-film structures fabricated by patterning and etching multiple layers of thin films, with properties meant to represent a broad range of microfabricated devices. We report notable alterations in the particle separation distances on the SMS chip compared to a bare silicon superstrate, which we attribute to a change in wave type through a comparison of different superstrates prepared. We demonstrate a high cell viability after acoustic manipulation of live cells on the SMS chip. The results herein demonstrate the possibility of integrating a suite of microfabricated sensors on a chip with acoustically driven manipulation capabilities for multiplexed sensing and analysis for bio-applications.

中文翻译：

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可拆卸表面微机械硅芯片上的微粒和细胞的声学驱动操纵


使用声学驱动技术可以精确地对颗粒和细胞进行图案化和移动（即操纵）。迄今为止，声学粒子操纵的应用仅限于平面。将声学操纵技术应用于具有微加工结构的表面以实现高通量传感具有很大的潜力。但与平面相比，添加薄膜结构可能会改变操纵特性。使用允许重复使用波发生装置的两芯片设置，我们研究了表面微加工硅（SMS）芯片上声流微操纵的可行性。 SMS 芯片是一种复杂的覆盖层，具有通过对多层薄膜进行图案化和蚀刻而制造的通用薄膜结构，其特性代表了广泛的微加工设备。我们报告了与裸硅覆盖层相比，SMS 芯片上的颗粒分离距离发生了显着变化，通过比较制备的不同覆盖层，我们将其归因于波类型的变化。我们对 SMS 芯片上的活细胞进行声学处理后证明了高细胞活力。本文的结果证明了将一套微加工传感器集成在具有声学驱动操纵功能的芯片上的可能性，用于生物应用的多重传感和分析。