Abstract

An analysis of methods for the formation of amorphous and crystal-amorphous materials and coatings is presented. The factors that influence the formation of an amorphous structure in materials are studied. The coatings made by cathodic-arc deposition with two single-component titanium and aluminum cathodes are deposited onto high-speed steel samples. Using X-ray diffraction analysis, the influence of the location of the sample in the vacuum chamber relative to the center on the degree of crystallinity of the coating structure is determined. Investigations of the influence of the speed of rotation of the working table about the axis on the percentage of the amorphous phase in the intermetallic coatings are performed. It is discovered that the highest content of the amorphous component is observed in the samples farthest from the axis of the table. This is due to the fact that the samples are under conditions of relatively rapid cooling. Based on the research results, a coating technology based on intermetallic compounds of the system (Ti,Al)N with an amorphous-crystalline structure made by cathodic-arc deposition with two single-component cathodes is developed.

中文翻译：

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Ti-Al-N非晶态晶体涂层的沉积技术

摘要

介绍了形成非晶态和晶体非晶态材料及涂层的方法的分析。研究了影响材料中非晶结构形成的因素。通过阴极电弧沉积和两个单组分钛和铝阴极制成的涂层被沉积到高速钢样品上。使用X射线衍射分析，可以确定样品在真空室中相对于中心的位置对涂层结构结晶度的影响。进行了工作台绕轴旋转的速度对金属间涂层中非晶相百分比的影响的研究。发现在离工作台轴最远的样品中观察到最高含量的无定形组分。这是由于样品处于相对较快的冷却条件下的事实。基于研究结果，开发了一种基于（Ti，Al）N体系的金属间化合物的涂层技术，该体系具有两个单组分阴极的阴极电弧沉积法，具有非晶态晶体结构。