Abstract—The phase composition of a film obtained by the method of the simultaneous electric arc sputtering of graphite and chromium from two evaporators is studied by Raman and X-ray photoelectron spectroscopy. Analysis of the chemical state of atoms by X-ray photoelectron spectroscopy is performed before and after cleaning the surface of the film by bombardment with argon ions. Raman spectroscopy reveals amorphous carbon and graphite nanoparticles in the film. Taking into account the dependence of the ratio of the intensities of the D and G peaks in the spectrum on the size of crystallites, the linear size of carbon nanostructures is estimated as ~6 nm. According to X-ray photoelectron spectroscopy, the formation of chromium carbide in the film with a stoichiometry of Cr_6.8C_3.2, which is close to the stoichiometry of Cr₇C₃ heptachromium tricarbide, as well as Cr₂O₃, Cr–O–C and Cr(OH)₃ chromium oxides, is found.

摘要—用拉曼光谱和X射线光电子能谱研究了通过同时从两个蒸发器进行石墨和铬的电弧溅射方法获得的薄膜的相组成。在通过用氩离子轰击清洁膜的表面之前和之后，通过X射线光电子能谱分析原子的化学状态。拉曼光谱法揭示了薄膜中的无定形碳和石墨纳米粒子。考虑到D和G强度比的依赖性在微晶尺寸的光谱峰上，碳纳米结构的线性尺寸估计为〜6 nm。根据X射线光电子能谱，在化学计量为Cr _6.8 C _3.2的膜中形成碳化铬，这与Cr ₇ C ₃七碳化铬以及Cr ₂ O ₃，Cr–O的化学计量相近。发现了–C和Cr（OH）₃氧化铬。