A new terahertz (THz) temperature sensor, which is based on surface plasmon resonance (SPR) by prism coupling excitation at THz frequency, is proposed. A novel prism coupling structure is designed for the temperature sensor by using unique features of thermo-optic effect for silicon at 1 THz and the high THz emission effiency of InSb. The medium thickness for the THz temperature sensor structure is analysed to get the optimal value by the finite element method, so that the sensitivity can reach optimal value. The optimal thickness of each layer is given, and the sensitivity of THz temperature sensor can reach \(9.75\times 10^{{{-4}}^{\circ }}/{^\circ }{\mathrm{C}}\), and FWHM of the SPR spectrum can reach \(0.073{^\circ }\), within the detection range of temperature, \(0{-}80{^\circ }{\mathrm{C}}\), and the relationship between SPR angle and temperature is obtained within the detection range of temperature.

提出了一种新的太赫兹（THz）温度传感器，该传感器基于表面等离子体激元共振（SPR），通过在THz频率下的棱镜耦合激发来实现。通过利用硅在1 THz时的热光效应和InSb的高THz发射效率，为温度传感器设计了一种新颖的棱镜耦合结构。通过有限元方法分析了太赫兹温度传感器结构的介质厚度，以获得最佳值，从而使灵敏度可以达到最佳值。给出了每层的最佳厚度，太赫兹温度传感器的灵敏度可以达到\（9.75 \乘以10 ^ {{{{-4}} ^ {\ circ}} / {^ \ circ} {\ mathrm {C} } \），并且在温度检测范围内，SPR光谱的FWHM可以达到\（0.073 {^ \ circ} \），\（0 {-} 80 {^ \ circ} {\ mathrm {C}} \），并且在温度检测范围内获得SPR角度与温度之间的关系。