In this paper, we demonstrate a new two-dimensional Dammann grating element to generate equilateral-triangle hexagonal spot array distribution with equal intensity. This type of grating is constructed by rotating two one-dimensional Dammann gratings through an angle of 60° to form a triangular hexagonal array illumination. In this work, a 7 × 7 spot array Dammann grating is fabricated by using electron beam lithography. We have verified the equilateral triangle hexagonal array in experiment, and measured the total diffraction efficiency of the grating up to 52%, with uniformity of 0.29. The new two-dimensional Dammann grating with its high performance opens avenues for three-dimensional measurement, electronic toll collection and other applications.

中文翻译：

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等边三角形六边形阵列，由两个 60° 的一维达曼光栅相交

在本文中，我们展示了一种新的二维达曼光栅元件，以产生等强度的等边三角形六边形光斑阵列分布。这种类型的光栅是通过将两个一维达曼光栅旋转 60° 的角度以形成三角形六边形阵列照明来构造的。在这项工作中，使用电子束光刻制造了一个 7 × 7 点阵达曼光栅。我们在实验中验证了等边三角形六边形阵列，测得光栅的总衍射效率高达52%，均匀度为0.29。具有高性能的新型二维达曼光栅为三维测量、电子收费和其他应用开辟了道路。