It is of great significance to measure the residual stress distribution accurately for optical elements and evaluate its influence on the performance of optical instruments in optical imaging, aviation remote sensing, semiconductor manufacturing, and other fields. The stress of optical elements can be closely related to birefringence based on photoelasticity. Thus, the method of quantifying birefringence to obtain the stress becomes the main method of stress measurement technologies for optical elements. This paper first introduces the basic principle of stress measurement based on photoelasticity. Then, the research progress of stress measurement technologies based on this principle is reviewed, which can be classified into two methods: polarization method and interference method. Meanwhile, the advantages and disadvantages of various stress measurement technologies are analyzed and compared. Finally, the developing trend of stress measurement technologies for optical elements is summarized and prospected.

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光学元件应力测量技术的研究进展

准确测量光学元件的残余应力分布并评估其对光学成像，航空遥感，半导体制造等领域中光学仪器性能的影响具有重要意义。光学元件的应力可能与基于光弹性的双折射密切相关。因此，量化双折射以获得应力的方法成为光学元件应力测量技术的主要方法。本文首先介绍了基于光弹性的应力测量的基本原理。然后，综述了基于该原理的应力测量技术的研究进展，可以将其分为极化法和干涉法两种方法。同时，分析并比较了各种应力测量技术的优缺点。最后，总结并展望了光学元件应力测量技术的发展趋势。