In this paper, we propose a unique micro multi-nozzle jet head to generate a stable column jet flow by applying vacuum suction to the side of a jetting nozzle. The micro multi-nozzle jet head was designed and fabricated to operate in both the jetting and suction modes selectively or simultaneously. The jet head includes eighteen jetting nozzles of 100 μm diameter, vacuum suction channels, inlets and a nozzle protection outer hole. The whole size of the micro multi-nozzle jet plate is 50 × 20 mm². To demonstrate large area organic thin film coating, micro multi-nozzle jet coating was performed on a 5th generation size (1100 × 1300 mm²) glass substrate. A poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) solution was selected as a test ink. To uniformly coat an organic thin film, we first investigated the physical parameter conditions such as jetting pressure, head suction pressure, stage moving speed, and coating head printing pitch. The thickness of the coated PEDOT:PSS thin film was 76.86 ± 3.33 nm and its uniformity (CV) was 4.33%.

在本文中，我们提出了一种独特的微型多喷嘴喷射头，通过对喷嘴的侧面施加真空吸力来产生稳定的柱状喷射流。微型多喷嘴喷射头经过设计和制造，可以有选择地或同时在喷射和抽吸两种模式下运行。喷头包括18个直径为100μm的喷嘴，真空抽吸通道，入口和喷嘴保护外孔。微型多喷嘴喷射板的整体尺寸为50×20 mm ²。为了演示大面积有机薄膜涂层，对第五代尺寸（1100×1300 mm ²）玻璃基板。选择聚（3,4-乙撑二氧噻吩）：聚（苯乙烯磺酸盐）（PEDOT：PSS）溶液作为测试油墨。为了均匀地涂覆有机薄膜，我们首先研究了物理参数条件，例如喷射压力，喷头抽吸压力，载物台移动速度和涂覆喷头的印刷间距。涂覆的PEDOT：PSS薄膜的厚度为76.86±3.33 nm，其均匀度（CV）为4.33％。