This article presents the design, construction, modeling, and testing of a novel magnetically levitated linear stage using a linear bearingless slice motor design, targeting in-vacuum transportation tasks in precision manufacturing systems. The stage is driven by novel linear hysteresis motors, where the motor secondaries are made of magnetically semihard material exhibiting magnetic hysteresis. The suspension of the stage in three degrees of freedom, including vertical, pitch, and roll, is achieved passively through permanent magnet bias flux. The suspension in the lateral and yaw directions is actively controlled. This compact design effectively reduces the number of sensors and actuators needed for stabilizing the levitation. The prototype stage has been successfully levitated with a maximum thrust force of 5.8 N under 2.5-A current amplitude, which generates a stage acceleration of 1200 mm/s 2 . The stage position control loop has a bandwidth of 30 Hz. The stage is tested to track a reference trajectory of the target application, and the maximum position tracking error is 50 μm. The stage's lateral displacement during motion is below 50 μm, which is well below making mechanical contact to the side walls. To our knowledge, this article presents the first linear bearingless slice motor design, and also the first study on linear versions of hysteresis motors.

中文翻译：

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配备线性无轴承片式磁滞电机的磁悬浮线性平台


本文介绍了一种使用线性无轴承切片电机设计的新型磁悬浮线性平台的设计、构造、建模和测试，针对精密制造系统中的真空运输任务。该平台由新型线性磁滞电机驱动，其中电机次级由具有磁滞现象的磁性半硬材料制成。平台的垂直、俯仰和横滚三个自由度的悬浮是通过永磁体偏置磁通被动实现的。横向和偏航方向的悬架是主动控制的。这种紧凑的设计有效地减少了稳定悬浮所需的传感器和执行器的数量。原型平台已成功悬浮，在2.5A电流幅值下最大推力为5.8N，产生1200mm/s 2 的平台加速度。平台位置控制环路的带宽为 30 Hz。该平台经测试可跟踪目标应用的参考轨迹，最大位置跟踪误差为50 μm。运动过程中平台的横向位移低于 50 μm，远低于与侧壁的机械接触。据我们所知，本文提出了第一个线性无轴承切片电机设计，也是第一个关于磁滞电机线性版本的研究。