This paper is dedicated to a comparative study of aluminum and alumina plasmas, induced under the same conditions of laser fluence and oxygen gas pressure in the range of 0.02 to 5 mbar. In this comparative analysis, measurements of ablated mass versus laser fluence and optical emission spectroscopy diagnostic of the plasmas are studied. The results from ablated mass measurements reveal the existence of two regimes of ablation according to a laser fluence threshold for phase explosion mechanism. This laser fluence threshold was found different for Al and Al₂O₃. A difference in the amount of ablated mass/pulse is also observed and is assigned to the optical (reflectivity and absorption) and thermodynamical properties (evaporation temperature) of the targets. Below a certain laser fluence threshold, thermal and non-thermal processes are involved. Above this laser fluence threshold, the mechanism of ablation is assigned to phase explosion. For plasma diagnostic by optical emission spectroscopy, two species were followed; the neutral Al (396.15 nm) for its persistence in time and distance and the AlO (the band head emission at 484.21 nm) molecule that is probably the precursor in alumina thin films formation. The spectra revealed a disparity in the intensity emission of neutral Al and AlO molecules, which were, related to the target's properties. The origin of AlO molecules recorded in aluminum and alumina plasma under oxygen ambiance is discussed. Their translational temperature for neutral Al, molecular vibrational temperature, and free linear velocities, are also compared.

本文致力于在0.02到5 mbar的激光通量和氧气压力相同条件下诱发的铝和氧化铝等离子体的比较研究。在此比较分析中，研究了烧蚀质量与激光注量的测量以及等离子体的光发射光谱诊断。烧蚀质量测量的结果表明，根据用于相爆炸机制的激光注量阈值，存在两种烧蚀方式。发现该激光通量阈值对于Al和Al ₂ O ₃是不同的。还观察到烧蚀质量/脉冲量的差异，并将其分配给靶的光学（反射率和吸收率）和热力学性质（蒸发温度）。在一定的激光通量阈值以下，涉及热过程和非热过程。在此激光通量阈值之上，将烧蚀机制分配给相爆炸。为了通过光发射光谱法进行等离子体诊断，跟随了两种。中性铝（396.15 nm）因其在时间和距离上的持久性以及AlO（484.21 nm处的带头发射）分子而可能是氧化铝薄膜形成的前体。光谱显示中性Al和AlO分子的强度发射存在差异，这与目标的特性有关。讨论了在氧气氛下记录在铝和氧化铝等离子体中的AlO分子的起源。还比较了它们对中性铝的平移温度，分子振动温度和自由线速度。