Abstract

The anodic bonding method was used to construct spherically bent crystal analyzers for a synchrotron radiation based non-resonant inelastic X-ray scattering spectrometer to probe the local electronic and molecular structure. In order to test the performance of the fabricated analyzers, the O K-edge X-ray Raman scattering spectrum of a lithium-ion battery electrolyte solution was measured and compared to the spectrum in the literature, which was measured by using a conventional X-ray absorption spectroscopy. The X-ray Raman scattering spectrometer based on a 1 m Rowland circle provided to record the data with a resolution of 0.8 eV at ∼10 keV. The obtained experimental results showed that the anodic bonding was achieved with a high bonding quality.

摘要

阳极键合方法用于构建基于同步辐射的非共振非弹性X射线散射光谱仪的球形弯曲晶体分析仪，以探测局部电子和分子结构。为了测试所制造的分析仪的性能，测量了锂离子电池电解液的OK-edge X射线拉曼散射光谱，并与文献中使用常规X-射线测量的光谱进行了比较。射线吸收光谱。基于 1 m 罗兰圆的 X 射线拉曼散射光谱仪以 0.8 eV 的分辨率记录数据，约 10 keV。获得的实验结果表明，阳极键合实现了高键合质量。